Lens barrel with mems actuators

ABSTRACT

A lens barrel for, e.g., a miniature camera or another device, includes an annular barrel, a plurality of first optical elements disposed coaxially within the barrel, an actuator device disposed coaxially within the barrel in front of the first optical elements, a front cover attached coaxially to a front surface of the actuator device, and a second optical element mounted coaxially in a central opening of a moving platform of the actuator device such that rotational movement of actuators in the actuator device causes the moving platform and second optical element to move conjointly with a purely translation movement along the optical axis of the second optical element and relative to the first optical elements.

BACKGROUND

1. Technical Field

This disclosure relates to actuators in general, and more particularly,to lens barrels incorporating microelectromechanical systems (MEMS)actuators that are suitable for use in for example, miniature cameras orother devices.

2. Related Art

Actuators for use in miniature cameras are well known. Such actuatorstypically comprise voice coils that are used to move a lens forfocusing, zooming, or optical image stabilization.

Miniature cameras are used in a variety of different electronic devices.For example, miniature cameras are commonly used in cellular telephones,laptop computers, and surveillance devices. Miniature cameras may havemany other applications.

It is frequently desirable to reduce the size of miniature cameras. Asthe size of electronic devices continues to be reduced, the size ofminiature cameras that are part of such electronic devices musttypically be reduced as well.

Further, it is desirable to enhance the shock resistance of suchminiature cameras. As the size of miniature cameras is reduced, smaller,more delicate components must often be utilized in their construction.Since such consumer products are typically subject to substantial abuse,such as rough handling and dropping, the components of miniature camerasmust be protected from the shock that is associated with such abuse.

For example, miniature cameras and other devices frequently incorporatelens barrels, i.e., elongated tubular structures containing opticalelements, e.g., lenses, light apertures, shutters, imagers, and thelike, typically arranged coaxially along an optical axis of the lensbarrel. In some instances, it may be desirable to move one or more ofthese elements selectably with respect to the others, e.g., to achievecertain effects, such as focusing and zooming effects. Accordingly, asthe size of miniature cameras and other devices incorporating lensbarrels are reduced, and to the extent that they must be protectedagainst the shocks of rough handling, a corresponding need exists forlens barrels which are reduced in size, yet which are able to withstandsuch abuse.

SUMMARY

In accordance with an embodiment of the present invention, lens barrelsincorporating novel linear actuators for use in, e.g., miniature camerasor other devices, are provided that effectively achieve the foregoingand other advantageous objectives.

In one example embodiment, a lens barrel comprises an annular barrelhaving a central axis. A plurality of first optical elements aredisposed in the barrel such that respective optical axes of the firstoptical elements are aligned coaxially with each other and the centralaxis of the barrel. An actuator device is also disposed in the lensbarrel. The actuator device includes a plurality of rotationallyoperable actuators, a moving platform coupled to each of the actuatorsby a flexible hinge, and a central opening in the moving platform thatis disposed concentric to a central axis of the actuator device.

The actuator device is disposed in the barrel in front of the firstoptical elements such that the central axis of the actuator device isaligned coaxially with the central axis of the barrel and the opticalaxes of the first optical elements.

A front cover is attached to a front surface of the actuator device suchthat a central opening in the front cover is concentric with the centralopening in the moving platform, and a second optical element is mountedin the central opening of the moving platform such that an optical axisof the second optical element is aligned coaxially with the central axisof the barrel, the optical axes of the first optical elements and thecentral axis of the actuator device, and such that rotational movementof the actuators causes the moving platform and second optical elementto move conjointly with a purely translation movement along the opticalaxis of the second optical element, and hence, coaxially along thecentral axis of the lens barrel.

In another embodiment, an actuator module includes a rear cover having acentral opening and a plurality of forwardly protruding alignment pinsdisposed symmetrically around an outer margin of a front surfacethereof. An actuator device having a central opening and a plurality ofradial tabs is disposed symmetrically around an outer periphery thereof,each tab having an outer circumferential surface and an alignmentaperture therein. The actuator device is attached to the front surfaceof the rear cover such that each of the alignment pins is engaged in acorresponding one of the alignment apertures, and the respective centralopenings of the rear cover and the actuator device are alignedconcentrically with each other. A front cover having a central openingand a plurality of radial slots disposed symmetrically around an outerperiphery thereof is attached to a front surface of the actuator devicesuch that each of the radial slots exposes a front surface of arespective one of the tabs, and the central opening of the front coveris aligned concentrically with the respective central openings of therear cover and the actuator device.

In yet another embodiment, a lens barrel comprises an annular barrelhaving a central axis. A plurality of first optical elements aredisposed in the barrel such that respective optical axes of the firstoptical elements are aligned coaxially with the central axis of thebarrel and with each other.

An actuator module as described above is disposed in the barrel in frontof the first optical elements. The actuator device further includes aplurality of rotational actuators, a moving platform coupled to each ofthe actuators by a flexible hinge, a central opening in the movingplatform disposed concentric to a central axis of the device, and aplurality of radial tabs disposed symmetrically around an outerperiphery thereof, each having an outer circumferential surface and analignment aperture disposed therein.

A second optical element is mounted in the central opening of the movingplatform of the actuator device such that an optical axis of the secondoptical element is aligned coaxially with the central axis of thebarrel, the optical axes of the first optical elements and the centralaxis of the actuator device, and such that rotational movement of theactuators causes the moving platform and second optical element to moveconjointly with purely translational movement along the optical axis ofthe second optical element.

The scope of the disclosure is defined by the claims, which areincorporated into this section by reference. A more completeunderstanding of embodiments will be afforded to those skilled in theart, as well as a realization of additional advantages thereof, by aconsideration of the following detailed description of one or moreembodiments. Reference will be made to the appended sheets of drawingsthat will first be described briefly.

BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 illustrates an electronic device having an actuator device, inaccordance with an embodiment.

FIG. 2 illustrates a miniature camera having a lens barrel, inaccordance with an embodiment.

FIG. 3A illustrates the lens barrel having an actuator module disposedtherein, in accordance with an embodiment.

FIG. 3B illustrates the lens barrel and an actuator module in anexploded view, in accordance with an embodiment.

FIG. 4 illustrates the actuator module having the actuator devicedisposed therein, in accordance with an embodiment.

FIG. 5A illustrates a top view of the actuator device, in accordancewith an embodiment.

FIG. 5B illustrates a top view of the actuator device, in accordancewith an embodiment.

FIG. 6A illustrates a portion of the actuator device, in accordance withan embodiment.

FIG. 6B illustrates a portion of the actuator device, in accordance withan embodiment.

FIG. 6C illustrates a portion of a platform, in accordance with anembodiment.

FIG. 6D illustrates a bottom view of a movable lens positioned formounting to the actuator device, in accordance with an embodiment.

FIG. 6E illustrates a side view of the movable lens mounted to theactuator device, in accordance with an embodiment.

FIG. 7 illustrates portions of the actuator device, in accordance withan embodiment.

FIG. 8 illustrates a bottom view of the actuator device in a deployedconfiguration, in accordance with an embodiment.

FIG. 9A illustrates a portion of the actuator device in a deployedconfiguration without any voltage applied thereto, in accordance with anembodiment.

FIG. 9B illustrates a portion of the actuator device in a deployedconfiguration with a small voltage applied thereto, in accordance withan embodiment.

FIG. 9C illustrates a portion of the actuator device in a deployedconfiguration with a maximum voltage applied thereto, in accordance withan embodiment.

FIG. 10 illustrates a lateral snubber assembly, in accordance with anembodiment.

FIG. 11 illustrates a hinge flexure and a motion control torsionalflexure, in accordance with an embodiment.

FIG. 12 illustrates an inner motion control hinge, in accordance with anembodiment.

FIG. 13 illustrates a cantilever flexure, in accordance with anembodiment.

FIG. 14 illustrates a serpentine contact flexure and a deploymenttorsional flexure, in accordance with an embodiment.

FIG. 15 illustrates a top view of a deployment stop, in accordance withan embodiment.

FIG. 16 illustrates a bottom view of the deployment stop, in accordancewith an embodiment.

FIG. 17A illustrates a flap damper, in accordance with an embodiment.

FIG. 17B illustrates a movable frame disposed between an upper modulecover and a lower module cover with no shock applied, in accordance withan embodiment.

FIG. 17C illustrates the movable frame disposed between the upper modulecover and the lower module cover with a shock applied, in accordancewith an embodiment.

FIG. 17D illustrates a partial top view of another actuator device, inaccordance with an embodiment.

FIG. 17E illustrates an enlarged top view of the actuator device, inaccordance with an embodiment.

FIG. 17F illustrates an outer hinge flexure, a lateral snubber assembly,a single snubber flap and an interlocking snubber flaps feature of theactuator device, in accordance with an embodiment.

FIGS. 17G and 17H illustrate the outer hinge flexure, in accordance withan embodiment.

FIGS. 17I and 17J illustrate the lateral snubber assembly, in accordancewith an embodiment.

FIGS. 17K and 17L illustrate cross-sectional views of the single snubberflap and the interlocking snubber flaps, in accordance with anembodiment.

FIG. 17M illustrates a top view of the lateral snubber assembly, thesingle snubber flap and the interlocking snubber flaps, in accordancewith an embodiment.

FIG. 17N illustrates cross-sectional views of the single snubber flapand the interlocking snubber flaps, in accordance with an embodiment.

FIG. 18 illustrates a ball-in-socket snubber, in accordance with anembodiment.

FIG. 19 illustrates the ball-in-socket snubber and two frame hinges, inaccordance with an embodiment.

FIG. 20 is another exploded perspective view of the first example lensbarrel of FIG. 3B, partially assembled, showing a plurality of firstoptical elements fully disposed within an annular barrel thereof, inaccordance with an embodiment.

FIG. 21 is a front end elevation view of the partially assembled firstlens barrel, with the actuator device and a second optical elementomitted to show mounting and alignment features on a front surface of afirst optical element immediately adjacent to the actuator device, inaccordance with an embodiment.

FIG. 22 is another exploded perspective view of the partially assembledfirst lens barrel, showing the actuator device fully disposed within thebarrel, in accordance with an embodiment.

FIG. 23 is a front end elevation view of the partially assembled firstlens barrel, with the first optical element and a front cover omitted toshow the actuator device mounted in the barrel, in accordance with anembodiment.

FIG. 24 is another exploded perspective view of the partially assembledfirst lens barrel, in accordance with an embodiment.

FIG. 25 is another perspective view of the partially assembled firstlens barrel, in accordance with an embodiment.

FIG. 26 is a front end elevation view of the first lens barrel, fullyassembled, showing wires of flexible circuit boards attached to a radialtab of the actuator device with a bolus of an electrically conductiveadhesive, in accordance with an embodiment.

FIG. 27 is an exploded perspective view of the actuator module of FIG.4, in accordance with an embodiment.

FIG. 28 is a perspective view of the actuator module, partiallyassembled, in accordance with an embodiment.

FIG. 29 is a front end elevation view of the partially assembledactuator module, in accordance with an embodiment.

FIG. 30 is a perspective view of the actuator module, fully assembled,in accordance with an embodiment.

FIG. 31 is an enlarged partial front end elevation view of the actuatormodule, showing a radially extending tab on the actuator device beingused both as an alignment mechanism and as an electrical contact pad ofthe module, in accordance with an embodiment.

FIG. 32 is a perspective view of the fully assembled actuator module,showing wires or flexible circuit boards electrically connected to tabsof the actuator device by boluses of an electrically conductiveadhesive, in accordance with an embodiment.

FIG. 33 is a front end elevation view of the fully assembled actuatormodule, showing wires or flexible circuit boards electrically connectedto the tabs of the actuator device, in accordance with an embodiment.

FIG. 34 is an exploded perspective view of a second example embodimentof a lens barrel having an actuator module disposed therein inaccordance with an embodiment of the present invention, showing aplurality of first optical elements disposed in a barrel thereof and asecond optical element mounted within an actuator module thereof, inaccordance with an embodiment.

FIG. 35 is a perspective view of the second lens barrel, partiallyassembled, in accordance with an embodiment.

FIG. 36 is a front end elevation view of the partially assembled secondlens barrel, showing circumferential surfaces of radial tabs of theactuator device being used to position the optical axis of the firstlens concentrically within the barrel and coaxial with the optical axesof the second lens group, in accordance with an embodiment.

FIG. 37 is a front end elevation view of the second lens barrel, fullyassembled, in accordance with an embodiment.

Embodiments of the disclosure and their advantages are best understoodby referring to the detailed description that follows. It should beappreciated that like reference numerals are used to identify likeelements illustrated in one or more of the figures.

DETAILED DESCRIPTION

An actuator device suitable for use in a wide variety of differentelectronic devices is disclosed in accordance with various embodiments.The actuator device may be adapted for use in a camera, such as aminiature camera, for example. The actuator device may be used to eithermanually or automatically focus the miniature camera. The actuatordevice may be used to zoom the miniature camera or to provide opticalimage stabilization for the miniature camera. The actuator device may beused to align the optics within the camera. The actuator device may beused for any other desired application in an electronic device or in anyother device.

In accordance with one or more embodiments, the actuator device maycomprise one or more MEMS actuators. The actuator device may be formedusing monolithic construction. The actuator device may be formed usingnon-monolithic construction.

The actuator device may be formed using contemporary fabricationtechniques, such as etching and micromachining, for example. Variousother fabrication techniques are contemplated.

The actuator device may be formed of silicon (e.g., single crystalsilicon and/or polycrystalline silicon). The actuator device may beformed of other semiconductors such as silicon, germanium, diamond, andgallium arsenide. The material of which the actuator device is formedmay be doped to obtain a desired conductivity thereof. The actuatordevice may be formed of a metal such as tungsten, titanium, germanium,aluminum, or nickel. Any desired combination of such materials may beused.

Motion control of the actuator device and/or items moved by the actuatordevice is disclosed in accordance with various embodiments. The motioncontrol may be used to facilitate a desired movement of an item whilemitigating undesired movement of the item. For example, the motioncontrol may be used to facilitate movement of a lens along an opticalaxis of the lens, while inhibiting other movements of the lens. Thus,the motion control may be used to facilitate movement of the lens insingle desired translational degree of freedom while inhibiting movementof the lens in all other translational degrees of freedom and whileinhibiting movement of the lens in all rotational degrees of freedom. Inanother example, the motion control may facilitate movement of the lensin all three translational degrees of freedom while inhibiting movementof the lens in all rotational degrees of freedom.

Thus, an enhanced miniature camera for standalone use and for use inelectronic devices may be provided. The miniature camera is suitable foruse in a wide variety of different electronic devices. For example, theminiature camera is suitable for use in electronic devices such ascellular telephones, laptop computers, televisions, handheld devices,and surveillance devices.

According to various embodiments, smaller size and enhanced shockresistance are provided. Enhanced fabrication techniques may be used toprovide these and other advantages. Such fabrication techniques mayadditionally enhance the overall quality and reliability of miniaturecameras while also substantially reducing the cost thereof.

FIG. 1 illustrates an electronic device 100 having an actuator device400, in accordance with an embodiment. As discussed herein, the actuatordevice 400 may have one or more actuators 550. In one embodiment, theactuators 550 may be MEMS actuators, such as electrostatic comb driveactuators. In one embodiment, the actuators 550 may be rotational combdrive actuators.

The electronic device 100 may have one or more actuators 550 for movingany desired component thereof. For example, the electronic device 100may have an optical device such as a miniature camera 101 that has theactuator 550 for moving optical elements such as one or more movablelenses 301 (shown in FIG. 2) that are adapted to provide focus, zoom,and/or image stabilization. The electronic device 100 may have anydesired number of the actuators 550 for performing any desiredfunctions.

The electronic device 100 may be a cellular telephone, a laptopcomputer, a surveillance device, or any other desired device. Theminiature camera 101 may be built into the electronic device 100, may beattached to the electronic device 100, or may be separate (e.g., remote)with respect to the electronic device 100.

FIG. 2 illustrates the miniature camera 101 having a lens barrel 200, inaccordance with an embodiment. The lens barrel 200 may contain one ormore optical elements, such as the movable lens 301, which may be movedby the actuator device 400 (shown in FIG. 1). The lens barrel 200 mayhave one or more optical elements which may be fixed. For example, thelens barrel 200 may contain one or more lenses, apertures (variable orfixed), shutters, minors (which may be flat, non-flat, powered, ornon-powered), prisms, spatial light modulators, diffraction gratings,lasers, LEDs and/or detectors. Any of these items may be fixed or may bemovable by the actuator device 400.

The actuator device 400 may move non-optical devices such as samplesthat are provided for scanning. The samples may be either biologicalsamples or non-biological samples. Examples of biological samplesinclude organisms, tissues, cells, and proteins. Examples ofnon-biological samples include solids, liquids, and gases. The actuatordevice 400 may be used to manipulate structures, light, sound, or anyother desired thing.

The optical elements may be partially or fully contained within the lensbarrel 200. The lens barrel 200 may have any desired shape, For example,the lens barrel 200 may be substantially round, triangular, rectangular,square, pentagonal, hexagonal, octagonal, or of any other shape orcross-sectional configuration. The lens barrel 200 may be eitherpermanently or removably attached to the miniature camera 101. The lensbarrel 200 may be defined by a portion of a housing of the miniaturecamera 101. The lens barrel 200 may be partially or completely disposedwithin the miniature camera 101.

FIG. 3A illustrates an actuator module 300 disposed within the lensbarrel 200, in accordance with an embodiment. The actuator module 300may contain the actuator device 400. The actuator device 400 may becompletely contained within the lens barrel 200, partially containedwithin the lens barrel 200, or completely outside of the lens barrel200. The actuator device 400 may be adapted to move optical elementscontained within the lens barrel 200, optical elements not containedwithin the lens barrel 200, and/or any other desired items.

FIG. 3B illustrates the lens barrel 200 and the actuator module 300 inan exploded view, in accordance with an embodiment. The movable lens 301is an example of an optical element that may be attached to the actuatordevice 400 and may be moved thereby. The actuator device 400 may bedisposed intermediate an upper module cover 401 and a lower module cover402.

Additional optical elements, such as fixed (e.g., stationary) lenses 302may be provided. The additional optical elements may facilitate focus,zoom, and/or optical image stabilization, for example. Any desirednumber and/or type of movable (such as via the actuator device 400) andfixed optical elements may be provided.

FIG. 4 illustrates the actuator module 300, in accordance with anembodiment. The actuator module 300 may be disposed partially orcompletely within the miniature camera 101. The actuator device 400 maybe disposed partially or completely within the actuator module 300. Forexample, the actuator device 400 may be sandwiched substantially betweenan upper module cover 401 and a lower module cover 402.

The actuator module 300 may have any desired shape. For example, theactuator module 300 may be substantially round, triangular, square,rectangular, pentagonal, hexagonal, octagonal, or of any other shape orcross-sectional configuration.

In one embodiment, the lens barrel 200 may be substantially round incross-sectional configuration and the actuator module 300 may besubstantially round in cross-sectional configuration. The use of asubstantially round lens barrel 200 and a substantially round actuatormodule 300 may facilitate an advantageous reduction in size. Thereduction in size may be facilitated, for example, because round lensesare commonly preferred. The use of a substantially round lens barrel 200and a substantially round actuator module 300 with round lenses tends toresult in a reduction of wasted volume and thus tends to facilitate areduction in size.

As discussed herein, one or more optical elements, such as the movablelens 301, may be disposed in an opening 405 (e.g., a hole) formed in theactuator module 300. Actuation of the actuators 550 may effect movementof the optical elements along their optical axis 410, for example. Thus,actuation of the actuators 550 may move one or more lenses to effectfocusing or zoom, for example.

The actuator module 300 may have cutouts 403 formed therein tofacilitate assembly of the actuator module 300 and alignment of theactuator device 400 contained therein. The cutouts 403 and/or electricalcontacts 404 partially disposed within the cutouts 403 may be used tofacilitate alignment of the actuator module 300 with respect to the lensbarrel 200.

FIG. 5A illustrates a top view of the actuator device 400 having theelectrical contacts 404, the opening 405, inner hinge flexures 501,kinematic mount flexures 502, movable frames 505, an outer frame 506,serpentine contact flexures 508, deployment torsional flexures 509,deployment stops 510, flap dampers 511, ball-in-socket snubbers 513,cantilever flexures 514, motion control torsional flexures 515, outerhinge flexures 516, a fixed frame 517, a platform 520, lens pads 521, apivot axis 525, the actuators 550, spaces 551, and blocks 552, inaccordance with an embodiment.

Blocks 552 (FIG. 5A) are shown to represent teeth 560 (see FIGS. 5B and7) of the actuator 550 in some figures. Those skilled in the art willappreciate that comb drives typically comprise a large number of verysmall teeth 560 that are difficult to show graphically on a drawing ofthis scale. For example, the actuator 550 may have between 1 and 10,000teeth on each side thereof and may have approximately 2,000 teeth oneach side thereof. Thus, in one embodiment, the blocks 552 may notrepresent the actual configuration of the teeth 560, but rather areshown in place of the teeth 560 to better illustrate the operation ofthe actuators 550, as discussed herein.

In accordance with an embodiment, the actuator device 400 may besubstantially hexagonal in shape. The hexagonal shape readilyfacilitates placement of the actuator device 400 within thesubstantially round lens barrel 200. The hexagonal shape alsofacilitates efficient use of wafer real estate. Other shapes arecontemplated.

The actuator device 400 may have a plurality of the actuators 550. Onlyone actuator 550 is illustrated in detail in FIG. 5A. The spaces 551 areshown in FIG. 5A for two additional actuators 550 that are notillustrated in detail. Thus, in one embodiment the actuator device 400may have three actuators 550 disposed in a substantially radiallysymmetric pattern about the opening 405 such that the actuators 550 arespaced approximately 120° apart from one another. The actuator device400 may have any desired number of the actuators 550 disposed in anydesired pattern. As further examples, the actuator device 400 may havetwo actuators 550 spaced approximately 180° apart from one another ormay have four actuators 550 spaced approximately 90° apart from oneanother.

As discussed herein, the actuators 550 may include one or more MEMSactuators, voice coil actuators, or any other desired type orcombination of types of actuators. For example, in one embodiment, eachactuator 550 may be a vertical rotational comb drive.

The actuators 550 may cooperate with one another to move a platform 520along the optical axis 410 (FIG. 3B), which in FIG. 5A is perpendicularto the plane of the actuator device 400. The actuators 550 may cooperatewith one another to move the platform 520 in a manner that maintains theplatform 520 substantially orthogonal with respect to the optical axis410 and in a manner that substantially mitigates rotation of theplatform 520.

Actuation of the actuators 550 is accomplished by the application of avoltage differential between adjacent teeth 560, represented by blocks552. Such actuation effects rotation of the actuators 550 to facilitatethe herein described movement of the platform 520.

In various embodiments, the platform 520 may be adapted substantially asa ring (e.g., as shown in FIG. 5A). Other shapes are contemplated. Theplatform 520 may have any desired shape.

Prior to deployment, the actuator device 400 may be a substantiallyplanar structure. For example, the actuator device 400 may besubstantially formed from a single, monolithic piece of material, suchas silicon. The actuator device 400 may be formed from a single die. Thedie may be approximately 4 to 5 millimeters across and approximately 150microns thick, for example.

The actuator device 400 may be formed by a MEMS technique, such asmilling or etching. A plurality of actuator devices 400 may be formedupon a single wafer. The overall shape or footprint of the actuatordevice 400 may be adapted to enhance the formation of a plurality of theactuator devices 400 on a single wafer.

Prior to operation, the fixed frame 517 of each actuator 550 may bedeployed to offset the adjacent pairs of teeth 560 represented by blocks552 with respect to one another, in accordance with an embodiment.Deployment may result in a substantially non-planar overallconfiguration of the actuator device 400. When deployed, each actuator550 may have a portion thereof (e.g., the fixed frame 517) extendingfrom the plane of the outer frame 506. The fixed frame 517 may extendfrom the plane of the outer frame 506 at an angle with respect thereto.Thus, when deployed, the fixed frame 517 may be substantiallyout-of-plane with respect to the outer frame 506.

Once deployed, the fixed frames 517 may be fixed or locked into positionsuch that they do not move further with respect to the outer frame 506,and are angularly offset or rotated with respect to the outer frame 506and with respect to the movable frame 505 (when the actuator 550 is notactuated). The fixed frames 517 may be mechanically fixed in position,adhesively bonded in position, or any desired combination ofmechanically fixed and adhesively bonded.

Actuation of the actuator 550 may cause the movable frame 505 to rotatetoward the deployed fixed frame 517 to effect desired movement of theplatform 520. Motion control torsional flexures 515 and outer hingeflexures 516 cooperate to facilitate motion controlled rotation of themovable frame 505, as discussed herein. The movable frame 505 rotatesabout the pivot axis 525.

FIG. 5B illustrates a top view of the actuator device 400 having teeth560 shown in the actuator 550 in place of the blocks 552 representativethereof, in accordance with an embodiment. The teeth 560 shown may beconsidered to be reduced in number and exaggerated in size for clarityin FIG. 5B.

FIG. 6A illustrates a top view of one of the actuators 550 having theinner hinge flexures 501, the ball-in-socket snubbers 513, the movableframe 505, the outer hinge flexures 516, the motion control torsionalflexures 515, the cantilever flexures 514, the fixed frame 517, thepivot axis 525, the serpentine contact flexure 508, the pseudokinematicmount and electrical contact 404, and the platform 520, in accordancewith an embodiment. FIG. 6A further illustrates a lateral snubberassembly 1001, which is further described herein.

The inner hinge flexure 501 cooperates with the cantilever flexure 514to transfer desired motion from the movable frame 505 to the platform520. Thus, actuation of the actuator 550 results in rotation of themovable frame 505, which in turn results in translation of the platform520, as discussed herein.

The movable frame 505 may pivot on the outer hinge flexures 516 in afashion similar to a door pivoting on its hinges. Upon the applicationof a shear force to the actuator device 400, one of the two outer hingeflexures 516 of the actuator 550 may be in tension while the outer hingeflexure 516 may be in compression. The two motion control torsionalflexures 515 tend to mitigate undesirable buckling of the outer hingeflexure 516 in such instances.

Each actuator may be substantially disposed within a motion controlmechanism that provides comparatively high lateral stiffness andcomparatively soft rotational stiffness. In one embodiment, the motioncontrol mechanism may have one or more (e.g., two) outer hinges flexures516 and may have one or more (e.g., two) motion control torsionalflexures 515. Thus, movement of the movable frame 505 may besubstantially constrained to desirable rotation thereof.

In one embodiment, the motion control mechanism for one actuator 550 maycomprise the outer frame 506, movable frame 505, the motion controltorsional flexures 515, the outer hinge flexures 516, the inner hingeflexures 501, the cantilever flexure 514, and the platform 520. In oneembodiment, the motion control mechanism may comprise all structuresthat tend to limit movement of the platform 520 to desired translationalmovement.

Each actuator 550 may be substantially contained within the motioncontrol mechanism to substantially limit competition for real estate onthe actuator device 400, in accordance with an embodiment. Since eachactuator 550 and its associated motion control mechanism occupysubstantially the same surface area of the actuator device 400, they donot compete for real estate. Thus, as the actuator 550 increases insize, its associated motion control mechanism may also increase in size.In certain embodiments, it is desirable to increase the size of anactuator 550 to increase the force provided thereby. In certainembodiments, it is desirable to also increase the size of the motioncontrol mechanism to maintain its ability to desirably limit movement ofthe platform 520. The movable frame 550 may be considered as a portionof the motion control mechanism.

FIG. 6B illustrates the actuator 550 showing the fixed frame 517 shadedfor clarity, in accordance with an embodiment. The shaded fixed frame517 may be deployed to a position out-of-plane of the actuator device400 and may be fixed in this deployed position.

The movable frame 505 may support moving portions of the actuator 550,such as some of the teeth 560 (see FIG. 7). The fixed frame 517 maysupport fixed portions of the actuator 550, such as others of the teeth560 (see FIG. 7). The application of a voltage to the actuator 550 maycause the movable frame 505 to rotate about the outer hinge flexures 516toward the fixed frame 517. Removal or reduction of the voltage maypermit a spring force applied by the inner hinge flexures 514, the outerhinge flexures 516 and the motion control torsional flexure 515 torotate the movable frame 505 away from the fixed frame 517. Sufficientclearance between the movable frame 505 and the fixed frame 517 may beprovided to accommodate such desired movement.

FIG. 6C illustrates a portion of the platform 520 having radialvariations 571, in accordance with an embodiment. In one embodiment, theradial variations 571 may be formed in the platform 520 to permit theplatform 520 to expand. The radial variations 571 may be angular bendsin the platform 520. Thus, an optical element such as the movable lens301 may be inserted into the opening 405 of the platform 520, which mayexpand to receive the movable lens 301 and which may grip the movablelens 301. The opening 405 may expand as the radial variations 571 of theplatform 520 deform (e.g., tend to straighten), so as to increase thecircumference of the opening 405.

FIG. 6D illustrates a perspective view of a movable lens positioned formounting to the actuator device 400 and FIG. 6E illustrates a side viewof the movable lens 301 attached to the actuator device 400, inaccordance with an embodiment. In one embodiment, the movable lens 301may be adhesively bonded to the platform 550, such as by adhesivelybonding standoffs 522 of the movable lens 301 to the lens pads 521. Forexample, epoxy 523 may be used to adhesively bond the movable lens 301to the platform 520. The movable lens 301 may be supported by the lenspad 521.

FIG. 7 illustrates a portion of the actuator 550 showing blocks 552superimposed over the teeth 560 of an actuator 550, in accordance withan embodiment. As discussed herein, the blocks 552 are representative ofthe teeth 560.

FIG. 8 illustrates a bottom perspective view of the actuator device 400in a deployed configuration, in accordance with an embodiment. In thedeployed configuration the unactuated movable frame 505 is substantiallyin-plane with respect to the outer frame 506 and the deployed fixedframe 517 is substantially out-of-plane with respect to the outer frame506 and the movable frame 505.

A voltage may be applied to each actuator 550 via the electricalcontacts 404. For example, two of the three contacts 404 may be used toapply a voltage from the lens barrel 200 to the actuator device 400. Thethird contact 404 may be unused or may be used to redundantly apply onepolarity of the voltage from the lens barrel 200 to the actuator device400.

Substantially the same voltage may be applied to the three actuators 550to result in substantially the same movement of the moving frames 505thereof. Application of substantially the same voltage to the threeactuators 550 may result in translation of the platform 520 with respectto the outer frame 506 such that the platform 520 remains substantiallyparallel to the outer frame 506. Thus, an optical element such as themovable lens 301 may be maintained in a desired alignment as the opticalelement is moved, such as along an optical axis 410 (FIG. 3B) thereof.

Substantially different voltages may be applied to the three actuators550 to result in substantially different movements of the moving frames505 thereof. Substantially different voltages may be applied to thethree actuators 550 using the three contacts 404 and a common return.Thus, each contact 404 may apply a separately controlled voltage to adedicated one of the three actuators 550.

The application of substantially different voltages to the threeactuators 550 may result in translation of the platform 520 with respectto the outer frame 506 such that the platform tilts substantially withrespect to the outer frame 506. Thus, when substantially differentvoltages are applied, the platform 520 does not necessarily remainsubstantially parallel to the outer frame. The application of differentvoltages to the three actuators 550 may be used to align the platform520 to the outer frame 506, for example. The application of differentvoltages to the three actuators 550 may be used to facilitate opticalimage stabilization or lens alignment, for example.

FIG. 9A illustrates a portion of the actuator device 400 in a deployedconfiguration without any voltage applied thereto, in accordance with anembodiment. Without any voltage applied to the actuator device 400, themovable frame 505 is substantially in-plane with respect to the outerframe 506 and the deployed fixed frame 517 is substantially out-of-planewith respect to the outer frame 506 and the movable frame 505.

FIG. 9B illustrates a portion of the actuator device 400 in a deployedconfiguration with a small voltage applied thereto, in accordance withan embodiment. With the small voltage applied, the movable frame 505 hasrotated toward the deployed fixed frame 517 and is in a partiallyactuated position.

FIG. 9C illustrates a portion of the actuator device 400 in a deployedconfiguration with a maximum voltage applied thereto, in accordance withan embodiment. As may be seen, the movable frame 505 has rotated furthertoward the deployed fixed frame 517 and is in a fully actuated position.

FIG. 10 illustrates a top view of a lateral snubber assembly 1001, inaccordance with an embodiment. The lateral snubber assembly 1001 mayhave a first snubber member 1002 and a second snubber member 1003. Thefirst snubber member 1002 may be formed upon the fixed frame 517 and thesecond snubber member may be formed upon the movable frame 505. Thefirst snubber member 1002 and the second snubber member 1003 maycooperate to inhibit undesirable lateral motion of the movable frame 505with respect to the fixed frame 517 (and consequently with respect tothe outer frame 506, as well) during shock or large accelerations. A gap“D” between the first snubber member 1002 and the second snubber member1003 may approximately 2-3 micrometers wide to limit such undesirablelateral motion.

FIG. 11 illustrates a perspective view of the motion control torsionalflexure 515 and the outer hinge flexure 516, in accordance with anembodiment. The motion control torsional flexure 515 and the outer hingeflexure 516 may be thinner than other portions of the actuator device400 to provide the desired stiffness of the motion control torsionalflexure 515 and the outer hinge flexure 516. For example, in oneembodiment the outer hinge flexures 516, the inner hinge flexures 501,and the motion control torsional flexures 515 may have a width ofapproximately 100 microns and a thickness of approximately 2-3 microns.

The motion control torsional flexure 515 may be located on the pivotaxis 525. In one embodiment, the pivot axis 525 is a line that connectsthe centers of the two outer hinge flexures 516. In one embodiment, thepivot axis 525 is the hinge line or axis about which the movable frame506 rotates.

FIG. 12 illustrates a perspective view of an inner hinge flexure 501, inaccordance with an embodiment. The inner hinge flexure 501 may bethinner than other portions of the actuator device 400 to provide thedesired stiffness of the inner hinge flexure 501. For example, in oneembodiment, the inner hinge flexure 501 may be approximately 500micrometers long, 60 micrometers wide, and 2-3 micrometers thick.

FIG. 13 illustrates a perspective view of a cantilever flexure 514having the inner hinge flexure 501, a first thinned section 1301, athicker section 1302, and a second thinned section 1303, in accordancewith an embodiment. The cantilever flexure 514 may be used to transfermovement of the movable frames 505 to the platform 520. The cantileverflexure 514 may be used to facilitate the conversion of rotation of themovable frames 505 into translation of the platform 520.

The inner hinge flexure 501 may bend to permit the movable frame 505 torotate while the platform 520 translates. The first thinned section 1301and the second thinned section 1303 may bend to permit a change indistance between the movable frame 505 and the platform 520 as themovable fame 505 transfers movement to the platform 520.

The cantilever flexure 514 may be thinner proximate the ends thereof andmay be thicker proximate the center thereof. Such configuration maydetermine a desired ratio of stiffnesses for the cantilever flexure 514.For example, it may be desirable to have a comparatively low stiffnessradially to compensate for the change in distance between the movableframes 505 and the platform 520 as the movable frame 505 transfersmovement to the platform 520.

FIG. 14 illustrates a perspective view of the serpentine contact flexure508 and the deployment torsional flexure 509, in accordance with anembodiment. The serpentine contact flexure 508 may facilitate electricalcontact between the electrical contacts 404 and the deployed fixedframe. The deployment torsional flexures 509 may facilitate rotation ofthe deployed fixed frame 517 with respect to the outer frame 506 duringdeployment.

FIG. 15 illustrates a perspective top view of a deployment stop 510showing that it does not contact an outer frame 506 on the top side whendeployed, in accordance with an embodiment. An epoxy 1501 may be appliedto the top surfaces of the deployment stop 510 and the outer frame 506to fix the deployment stop 510 into position with respect to the outerframe 506. Thus, the epoxy 1501 may fix the deployed fixed frame 517into position with respect to the outer frame 506. Various portions ofthe deployed fixed frame 517 may function as the deployment stops 517.For example, other portions of the deployed fixed frame 517 that abutthe outer frame 506 when the deployed fixed frame is deployed mayfunction as the deployment stops 510.

FIG. 16 illustrates a perspective bottom view of the deployment stop 510showing that it contacts the outer frame 506 on the bottom side whendeployed, in accordance with an embodiment. The epoxy 1501 may beapplied to the bottom surfaces of the deployment stop 510 and the outerframe 506 to fix the deployment stop 510 into position with respect tothe outer frame 506. The epoxy 1501 may be applied to both the topsurfaces and the bottom surfaces of the deployment stop 510 and theouter frame 506, if desired.

FIG. 17A illustrates a perspective view of a flap damper 511, inaccordance with an embodiment. The flap damper 511 is located where thedesirable relative motion during intended operation, (e.g., actuation)of actuators 550, is comparatively low and where the potentialundesirable relative motion during shock is comparatively high. Forexample, the flap damper 511 may be formed on the pivot axis 525.

A damping material 1701 may extend across a gap 1702 formed between theouter frame 506 and the movable frame 505. The damping material 1701 mayhave a high damping coefficient. For example, in one embodiment, thedamping material 1701 may have a damping coefficient of between 0.7 and0.9. For example, the damping material 1701 may have a dampingcoefficient of approximately 0.8. In one embodiment, the dampingmaterial 1701 may be an epoxy.

The damping material 1701 may readily permit the desired motion of themovable frame 505 relative to the outer frame 506. The damping material1701 may inhibit undesired motion of the movable frame 505 relative tothe outer frame 506 due to a shock. Thus, the damping material 1701 maypermit rotation of the movable frame 505 relative to the outer frame 506during actuation of the actuators 550 and may inhibit lateral motionand/or out of plane motion of the movable frame 505 relative to theouter frame 506 during a shock.

The flap damper 511 may have a flap 1706 that extends from the movableframe 505 and may have a flap 1707 that extends from the outer frame506. A gap 1702 may be formed between the flap 1706 and the flap 1707.

An extension 1708 may extend from the flap 1706 and/or an extension 1709may extend from the flap 1707. The extension 1708 and the extension 1709may extend the length of the gap 1702 such that more damping material1701 may be used than would be possible without the extension 1708and/or the extension 1709.

Trenches 1719 may be formed in flaps 1706 and/or 1707 and a trenchmaterial 1720 that is different from the material of the flaps 1706 and1707 may be deposited within the trenches 1719. For example, the flaps1706 and 1707 may be formed of single crystalline silicon and the trenchmaterial 1720 may be formed of polycrystalline silicon. Any desiredcombination of materials may be used for the flaps 1706 and 1707 and forthe trench material 1720, so as to achieve the desired stiffness of theflaps 1706 and 1707.

FIG. 17B illustrates the movable frame 505 disposed between the uppermodule cover 401 and the lower module cover 402 without a shock beingapplied thereto. In the absence of a shock, the movable frame 505remains in its unactuated position and the outer hinge flexure 516 isunbent.

FIG. 17C illustrates the movable frame 505 after it has been moved to aposition against the lower module cover 402 by a shock, such as may becaused by dropping the electronic device 100. Movement of the movableframe 505 may be limited or snubbed by the lower module housing 402 andundesirable double bending of the outer hinge flexure 516 may be limitedthereby. In a similar fashion, the upper module housing 401 may limitmovement of the movable frame 505 and double bending of the outer hingeflexure 516. Thus, undesirable stress within the outer hinge flexures516 may be mitigated.

FIGS. 17D-17H illustrate an alternative embodiment of an outer hingeflexure 1752. As illustrated in these figures, in some embodiments, theouter hinge flexures 1752 may be X-shaped for increased control of themotion of the moveable frame 505 in the lateral direction. The outerhinge flexures 516, 1752 may generally tend to bend, such as about acentral portion thereof, to facilitate movement of the moveable frame505 with respect to the outer frame 506. Other shapes are contemplated.For example, the outer hinge flexure 1752 can be shaped like a H, I, M,N, V, W, Y, or may have any other desired shape. Each outer hingeflexure 1752 can comprise any desired number of structures thatinterconnect the outer frame 506 and the movable frame 505. Thestructures may be interconnected or may not be interconnected. Thestructures may be substantially identical with respect to one another ormay be substantially different with respect to one another. Each outerhinge flexure 1752 may be substantially identical with respect to eachother hinge flexure 1752 or may be substantially different with respectthereto.

The outer hinge flexures 516, 1752 and any other structures may beformed by etching as discussed herein. The outer hinge flexure and anyouter structures may comprise single crystalline silicon,polycrystalline silicon, or any combination thereof.

FIGS. 17D-F and 17I-17N show an alternative embodiment of the lateralsnubber assembly 1754, another embodiment of which is discussed above inconnection with FIG. 10 herein. The lateral snubber assembly 1754 ofFIGS. 17D-F and 17I-17N generally has more rounded curves with respectto the lateral snubber assembly 1001 of FIG. 10.

FIGS. 17D-17F illustrate an example embodiment of an interlockingsnubber flaps feature 1756 useful for constraining both verticalmovement of a component, e.g., moveable component 505, in the ±Zdirections, as well as lateral movement thereof, i.e., in the ±X and/or±Y directions.

As illustrated in FIG. 17F, this interlocking flaps feature includes theformation of a pair of flaps 1756A and 1756B respectively extending frommoveable and fixed components 505 and 506 and over a correspondingshoulder 1762 formed on the other, opposing component. The flap 1756A onthe moveable component 505 limits motion of the moveable component 505in the −Z direction, and the flap 1756B on the fixed component 506limits motion of the moveable component 505 in the −Z direction.Additionally, as illustrated in FIGS. 17K, 17L and 17N, the gap 1760between the two components 505 and 506, which may be fanned as discussedabove in connection with FIGS. 49A-49F, may limit motion of the moveablecomponent 505 in the ±X and/or ±Y directions.

As illustrated in FIG. 17M, the respective front ends of the flaps 1756Aand 1756B may define corners at the opposite ends thereof, and one ormore of the corners may incorporate elliptical fillets 1766.

As illustrated in FIGS. 17D-17L and FIGS. 17K-17N, a single snubber flap1758 may be provided for constraining lateral movement of a component,e.g., moveable component 505, in an actuator device 1750. For example,the snubber flap 1758, which in some embodiments may comprisepolysilicon, may extend from a fixed component, e.g., component 506, andtoward but not over, the moveable component 505 to limit motion of themoveable component 505 in the lateral, i.e., in the in the ±X and/or ±Ydirections. As illustrated in FIGS. 17K, 17L and 17N, the gap 1764between the fixed and moveable components 505 and 506 can be maderelatively larger than the gap 1768 between the snubber flap 1758 andthe moveable component 505, such that the snubber flap 1758 does notinterfere with normal rotational motion of the movable component 505,but does function to prevent unwanted lateral motion thereof.

FIG. 18 illustrates a ball-in-socket snubber 513, in accordance with anembodiment. The ball-in-socket snubber 513 may have a substantiallycylindrical ball 518 that is slidably disposed within a substantiallycomplimentary cylindrical socket 519. The ball-in-socket snubber 513permit desired movement of the platform 520 with respect to the outerframe 506 and limit other movement.

FIG. 19 illustrates a perspective view of the ball-in-socket 513 and twoframe hinges 526, in accordance with an embodiment. The frame hinges 526may be hinge flexures in the otherwise substantially rigid outer frame506. The frame hinges 526 permit the outer frame 506 to deformout-of-plane while maintained desired rigidity in-plane.

FIG. 3B is an exploded perspective view of a first example embodiment ofa lens barrel 200 having an actuator device 400 disposed therein inaccordance with an embodiment of the present invention. As illustratedin FIG. 3B, a lens barrel assembly 201 comprises an annular lens barrel200 having a central axis corresponding to an optical axis 410.

A plurality of first optical elements, viz., the stationary lenses 302,is disposed in the lens barrel 200 such that the respective optical axesof the stationary lenses 302 are aligned coaxially with each other andthe optical axis 410 of the lens barrel 200. An actuator device 400 ofthe type discussed above in connection with FIG. 5A is disposed in thelens barrel 200 in front of the stationary lenses 302. The actuatordevice 400 includes actuators 550 (e.g., rotationally acting actuatorsin one embodiment), a moving platform 520 coupled to each of theactuators 550 by a cantilever flexure (e.g., a flexible hinge) 514, anda central opening 405 in the moving platform 520 that is concentric to acentral axis of the device 400. The actuator device 400 is mountedconcentrically in the lens barrel 200 in front of the stationary lenses302 in the manner described in more detail below such that the centralaxis of the device 400 is aligned coaxially with the optical axis 410 ofthe lens barrel 200 and the optical axes of the stationary lenses 302.

A front cover, which may be substantially similar to the front cover 401of the actuator module 300, is attached to a front surface of theactuator device 400, e.g., by adhesive bonding, such that a centralopening 304 in the front cover 401 is disposed concentric with thecentral opening 405 in the moving platform 520. The moveable lens 301 ismounted in the central opening 405 of the moving platform 520 such thatan optical axis of the movable lens 101 is aligned coaxially with thecentral axis 410 of the lens barrel 200, the optical axes of thestationary lenses 302 and the central axis of the actuator device 400,and such that rotational movement of the actuators 550 causes the movingplatform 520 and movable lens 101 to move conjointly with a purelytranslation movement along the optical axis of the movable lens 101, andhence, substantially coaxially along the optical axis 410 of the lensbarrel 200.

FIG. 20 is another exploded perspective view of the first lens barrel200 of FIG. 3B, partially assembled, in which the stationary lenses 302are shown fully disposed within the lens barrel 200, and FIG. 21 is afront end elevation view of the partially assembled first lens barrel200, with the actuator device 400, front cover 401 and moveable lens 101omitted to show raised actuator device mounting features 306 andforwardly protruding alignment pins 308 disposed on a front surface 305of a stationary lens 302 immediately adjacent to the actuator device400.

As illustrated in FIGS. 20 and 21, the first stationary lens 302immediately adjacent to the actuator device 400 includes a plurality offorwardly protruding alignment pins 306, together with a plurality ofraised platform mounting features 308, both disposed symmetricallyaround an outer margin of a front surface 305 thereof. The raisedplatform features 308 correspond to areas on the actuator device 400 atwhich an adhesive may be placed in order to bond the device 400 to thefront surface 305 of the immediately adjacent stationary lens 302, andthe front cover 401 may also be provided with similar raised mountingfeatures 308 to enable its attachment to the front surface of theactuator device 400, e.g., with an adhesive. As illustrated in FIG. 3B,the actuator device 400 further includes electrical contacts 404 (alsoreferred to as radial tabs 404) disposed symmetrically around an outerperiphery thereof, each tab 404 having an outer circumferential surface503 and an alignment aperture 310 disposed therein.

FIG. 22 is another exploded perspective view of the partially assembledfirst lens barrel 200, showing the actuator device 400 fully disposedwithin the lens barrel 200, and FIG. 23 is a front end elevation view ofthe partially assembled first lens barrel 200, with the movable lens 101and front cover 401 omitted to show the actuator device 400 mountedconcentrically in the lens barrel 200. As illustrated in FIGS. 22 and23, the actuator device 400 is attached to the raised actuator devicemounting features 308 disposed on the adjacent first optical element305, e.g., by adhesive bonding, such that each of the alignment pins 306engages in a corresponding one of the alignment apertures 310 in thetabs 404, and a tab-shaped one of the raised mounting features 308 isdisposed in a respective one of the recesses 504 of the actuator device400 so as to align the actuator device 400 concentrically with respectto the immediately adjacent stationary lens 302 (see, FIGS. 20 and 21),and such that the outer circumferential surfaces 503 of the tabs 404respectively abut the inner surface of the lens barrel 200 so as toalign the actuator device 400 concentrically within the lens barrel 200.

FIGS. 24 and 25 are other exploded perspective views of the partiallyassembled first lens barrel 200, and FIG. 26 is a front end elevationview of the first lens barrel 200, fully assembled. As illustrated inFIGS. 24-26, in one embodiment, the front cover 401 may include aplurality of radial slots (e.g., cutouts) 403 disposed symmetricallyaround its outer periphery, each slot 403 exposing a front surface of arespective one of the tabs 404. In embodiments in which the actuatordevice 400 is made of an electrically conductive material, e.g., asemiconductor material, such as silicon, the tabs 404, including thefront surfaces thereof, will also be electrically conductive.Alternatively, the front surface of at least one of the tabs 404 may bemade electrically conductive by plating it with an electricallyconductive material, such as gold, monocrystalline silicon orpolycrystalline silicon.

In either case, as illustrated in FIG. 26, the electrically conductivefront surfaces of the tabs 404 exposed by the slots 403 provide aconvenient way for conveying external ground and power signals to theactuators 550 of the actuator device 400. For example, in the exampleembodiment illustrated in FIG. 26, a wire or a flexible circuit board312 carrying, for example, an electrical ground or power signal, can beelectrically connected to the conductive front surface of a tab 404 byway of, e.g., a bolus 314 of an electrically conductive adhesivedisposed within the corresponding radial slot 403 and upon theconductive surface.

As discussed above, any one of the movable and stationary lenses 301,302 in the first lens barrel 200 may comprise, instead of lenses, otheroptical elements, such as a group of lenses, including compound lenses,apertures (variable or fixed), shutters, mirrors (which may be flat,non-flat, powered, or non-powered), prisms, spatial light modulators,diffraction gratings, lasers, LEDs, detectors and the like. The type andarrangement of these optical elements 301, 302 may be as described in,for example, any of the following: U.S. Pat. No. 7,663,817 issued Feb.16, 2010, U.S. Patent Application Publication No. 2008/0044172 publishedFeb. 21, 2008,U.S. patent application Ser. No. 11/550,305 filed Oct. 17,2006, and U.S. patent application Ser. No. 11/505,660 filed Aug. 16,2006, all of which are incorporated herein by reference in theirentirety.

With reference to FIG. 3B, in one embodiment, one or more of themoveable and stationary lenses 301, 302, e.g., the movable lens 301, maybe mounted concentrically within an annular lens holder, and at leastone of the lenses 301 or 302, the lens holder, the annular lens barrel200 and the front cover 401 may comprise a plastic material, forexample, a thermoforming or a thermosetting plastic, for cost reductionand shock resistance.

FIG. 27 is an exploded perspective view of the actuator module 300 ofFIG. 4, FIG. 28 is a perspective view of the actuator module 300partially assembled, FIG. 29 is a front end elevation view of theactuator module 300 partially assembled, and FIG. 30 is a perspectiveview of the actuator module 300 fully assembled. As illustrated in thesefigures, the actuator module 300 includes many of the features of thefirst lens barrel 200 described above, and includes, instead of thestationary lens 302 disposed immediately adjacent to the actuator device400, a rear cover (e.g., a lower module cover or housing) 402 having acentral opening 2702 and a plurality of raised actuator device mountingfeatures 308 and forwardly protruding alignment pins 306 disposedsymmetrically around an outer margin of its front surface.

An actuator device 400 is mounted on the raised mounting features 308 onthe front surface of the rear cover 402, e.g., with an adhesive. Theactuator device 400 includes a central opening 405 and radial tabs 404disposed symmetrically around an outer periphery thereof. As above, eachtab 404 has an arcuate outer circumferential surface 503 and analignment aperture 310 disposed therein.

The interrelationship between the tabs 404 and alignment pins 306,circumferential surfaces 503 and alignment apertures 310 is more clearlyillustrated in FIG. 31, which is an enlarged partial front end elevationview of the actuator module 300 installed concentrically within a lensbarrel 200, showing a radially extending tab 404 on the actuator device400 being used both as an alignment mechanism and as an electricalcontact pad of the actuator module 300. In particular, the actuatordevice 400 is attached to the raised mounting features 308 on the frontsurface of the rear cover 402 such that each of the alignment pins 306is engaged in a corresponding one of the alignment apertures 310, thetab-shaped mounting features 308 are recessed in respective ones of therecesses 504 of the actuator device 400, and the respective centralopenings 2702 and 405 of the rear cover 402 and the actuator device 400are thereby aligned concentrically with each other. Additionally, whenthe actuator module 300 is then inserted into the annular lens barrel200, the arcuate outer circumferential surfaces 503 of the tabs 404respectively abut an inner surface 3102 of the lens barrel 200 so as toprecisely align the actuator module 300 concentrically within the lensbarrel 200.

The actuator module 300 includes a front cover 401 which is very similarto the front cover 401 of the first lens barrel 200 described above, inthat it includes a plurality of raised actuator device mounting features308 on its rear surface, a central opening 304 and a plurality of radialslots 403 disposed symmetrically around an outer periphery thereof. Asin the first lens barrel 200 above, the front cover 401 may be attachedto the raised mounting features 308 on the front surface of the actuatordevice 400, e.g., with an adhesive, such that each of the radial slots403 exposes a front surface of a respective one of the tabs 404, and thecentral opening 304 of the front cover 401 is aligned concentricallywith the respective central openings 2702 and 405 of the rear cover 402and the actuator device 400.

As illustrated in FIGS. 32 and 33, external power and ground signals forcontrolling the actuator module 300 can be conveyed into the actuatormodule 300 in a manner similar to that described above in connectionwith the first lens barrel 200 and FIG. 26. In the example embodimentsillustrated in FIGS. 32 and 33, a wire or a flexible circuit board 312carrying, for example, an electrical ground or power signal, can beelectrically connected to the conductive front surfaces of one or moreof the radial tabs 404 by way of, e.g., a bolus 314 of an electricallyconductive adhesive disposed within the radial slots 403 in the frontcover 401 and upon the front surfaces of the tabs 404.

As illustrated in FIGS. 34-37, the actuator module 300 described abovecan be used to confect a second example lens barrel assembly 3400 inaccordance with an embodiment of the present invention. Like the firstlens barrel assembly 201 above, the second lens barrel 3400 comprises anannular lens barrel 200 incorporating a plurality of stationary lenses302 (see FIG. 3B). The actuator module 300 is installed into the barrel200 in front of the stationary lenses 302, for example, by bonding arear surface of the rear cover 402 to a front surface of the immediatelyadjacent stationary lens 302 with an adhesive. As discussed above inconnection with FIG. 31, in this embodiment, the outer circumferentialsurfaces 503 of the tabs 404 respectively abut an inner surface 3102 ofthe barrel 200 and serve to precisely align the actuator module 300concentrically within the lens barrel 200.

As in the first lens barrel 200 described above, some or all of the lensbarrel 200, movable and stationary lenses 301, 302, annular lens holdersand the front and rear covers 401 and 402 may comprise a plasticmaterial.

Although the actuator disclosed herein is described as a MEMS actuator,such description is by way of example only and not by way of limitation.Various embodiments may include non-MEMS actuators, components ofnon-MEMS actuators, and/or features of non-MEMS actuators.

Thus, an actuator suitable for use in a wide variety of differentelectronic devices may be provided. Motion control of the actuatorand/or items moved by the actuator may also be provided. As such, anenhanced miniature camera for use in electronic devices may be provided.

According to various embodiments, smaller size and enhanced shockresistance for miniature cameras are provided. Enhanced fabricationtechniques may be used to provide these and other advantages. Thus, suchfabrication techniques may additionally enhance the overall quality andreliability of miniature cameras while also substantially reducing thecost thereof.

Where applicable, the various components set forth herein may becombined into composite components and/or separated into sub-components.Where applicable, the ordering of various steps described herein may bechanged, combined into composite steps, and/or separated into sub-stepsto provide features described herein.

Embodiments described herein illustrate but do not limit the disclosure.It should also be understood that numerous modifications and variationsare possible in accordance with the principles of the disclosure.

1. A lens barrel, comprising: an annular barrel having a central axis; aplurality of first optical elements disposed in the barrel such thatrespective optical axes of the first optical elements are alignedcoaxially with each other and the central axis of the barrel; anactuator device having a plurality of rotationally acting actuators, amoving platform coupled to each of the actuators by a flexible hinge,and a central opening in the moving platform disposed concentric to acentral axis of the actuator device, the actuator device being disposedin the barrel in front of the first optical elements such that thecentral axis of the device is aligned coaxially with the central axis ofthe barrel and the optical axes of the first optical elements; a frontcover attached to a front surface of the actuator device such that acentral opening in the front cover is concentric with the centralopening in the moving platform; and, a second optical element mounted inthe central opening of the moving platform such that an optical axis ofthe second optical element is aligned coaxially with the central axis ofthe barrel, the optical axes of the first optical elements, and thecentral axis of the actuator device, and such that rotational movementof the actuators causes the moving platform and second optical elementto move conjointly with a purely translation movement along the opticalaxis of the second optical element.
 2. The lens barrel of claim 1,wherein: one of the first optical elements immediately adjacent to theactuator device includes a plurality of forwardly protruding alignmentpins disposed symmetrically around an outer margin of a front surfacethereof; the actuator device further includes a plurality of radial tabsdisposed symmetrically around an outer periphery thereof, each tabhaving an outer circumferential surface and an alignment aperturetherein; and, the actuator device is disposed in the barrel such that:each of the alignment pins is engaged in a corresponding one of thealignment apertures so as to align the actuator device concentricallywith respect to the immediately adjacent optical element; and, the outercircumferential surfaces of the tabs respectively abut an inner surfaceof the barrel so as to align the actuator device concentrically withinthe barrel.
 3. The lens barrel of claim 2, wherein: the front coverincludes a plurality radial slots, each exposing a front surface of arespective one of the tabs; and, the front surface of at least one ofthe tabs is electrically conductive, such that a wire or a flexiblecircuit board is electrically connectable thereto by way of a bolus ofan electrically conductive adhesive disposed thereon.
 4. The lens barrelof claim I, wherein at least one of the first and second opticalelements comprises one or more of a lens, a group of lenses, a fixedaperture, a variable aperture, a shutter, a mirror, a prism, a spatiallight modulator, a diffraction grating, a laser, an LED and/or adetector.
 5. The lens barrel of claim 1, wherein: at least one of thefirst and second optical elements comprises a lens mountedconcentrically within an annular lens holder; and, at least one of thebarrel, the front cover, the lens and the annular lens holder comprisesa plastic material.
 6. A miniature camera incorporating the lens barrelof claim
 1. 7. An electronic device incorporating the miniature cameraof claim
 6. 8. The electronic device of claim 7, wherein the devicecomprises a cellular telephone, a laptop computer, a personal digitalassistant or a surveillance device.
 9. An actuator module, comprising: arear cover having a central opening and a plurality of forwardlyprotruding alignment pins disposed symmetrically around an outer marginof a front surface thereof; an actuator device having a plurality ofrotationally acting actuators, a moving platform coupled to each of theactuators by a flexible hinge, a central opening and a plurality ofradial tabs disposed symmetrically around an outer periphery thereof,each tab having an outer circumferential surface and an alignmentaperture therein, the actuator device being attached to the frontsurface of the rear cover such that each of the alignment pins isengaged in a corresponding one of the alignment apertures and therespective central openings of the rear cover and the actuator deviceare aligned concentrically with each other; and, a front cover having acentral opening and a plurality of radial slots disposed symmetricallyaround an outer periphery thereof, the front cover being attached to afront surface of the actuator device such that each of the radial slotsexposes a front surface of a respective one of the tabs and the centralopening of the front cover is aligned concentrically with the respectivecentral openings of the rear cover and the actuator device.
 10. Theactuator module of claim 9, wherein the front surface of at least one ofthe tabs is electrically conductive, such that a wire or a flexiblecircuit board is electrically connectable thereto by way of a bolus ofan electrically conductive adhesive disposed thereon.
 11. The actuatormodule of claim 9, wherein the actuator device comprises asemiconductor.
 12. The actuator module of claim 9, wherein at least oneof the front and rear covers comprises a thermosetting plastic or athermoforming plastic.
 13. A lens barrel incorporating the actuatormodule of claim 9, wherein the outer circumferential surfaces of thetabs respectively abut an inner surface of the lens barrel so as toalign the actuator module concentrically within the lens barrel.
 14. Aminiature camera incorporating the lens barrel of claim
 13. 15. Anelectronic device incorporating the miniature camera of claim
 14. 16.The electronic device of claim 15, wherein the device comprises acellular telephone, a laptop computer, a personal digital assistant asurveillance device.
 17. A lens barrel, comprising: an annular barrelhaving a central axis; a plurality of first optical elements disposed inthe barrel such that respective optical axes of the first opticalelements are aligned coaxially with the central axis of the barrel andwith each other; an actuator module disposed in the barrel in front ofthe first optical elements, the actuator module comprising: a rear coverhaving a central opening and a plurality of forwardly protrudingalignment pins disposed symmetrically around an outer margin of a frontsurface thereof; an actuator device, including a plurality ofrotationally acting actuators, a moving platform coupled to each of theactuators by a flexible hinge, a central opening in the moving platformdisposed concentric to a central axis of the device, and a plurality ofradial tabs disposed symmetrically around an outer periphery thereof,each tab having an outer circumferential surface and an alignmentaperture therein, wherein the actuator device is attached to the frontsurface of the rear cover such that each of the alignment pins isengaged in a corresponding one of the alignment apertures and therespective central openings of the rear cover and the device are alignedconcentrically with each other and the outer circumferential surfaces ofthe tabs respectively abut an inner surface of the barrel so as to alignthe actuator module concentrically within the barrel; and, a front coverhaving a central opening and a plurality of radial slots disposedsymmetrically around an outer periphery thereof, the front cover beingattached to a front surface of the actuator device such that each of theradial slots exposes a front surface of a respective one of the tabs andthe central opening of the front cover is aligned concentrically withthe respective central openings of the rear cover and the actuatordevice; and, a second optical element mounted in the central opening ofthe moving platform such that an optical axis of the second opticalelement is aligned coaxially with the central axis of the barrel, theoptical axes of the first optical elements and the central axis of theactuator device, and such that rotational movement of the actuatorscauses the moving platform and second optical element to move conjointlywith purely translational movement along the optical axis of the secondoptical element.
 18. The lens barrel of claim 17, wherein the frontsurface of at least one of the tabs is electrically conductive, suchthat a wire or a flexible circuit board is electrically connectablethereto by way of a bolus of an electrically conductive adhesivedisposed thereon.
 19. A miniature camera incorporating the lens barrelof claim
 1. 20. An electronic device incorporating the miniature cameraof claim 19.